Open AccessOutput Power of Piezoelectric MEMS Vibration Energy Harvesters Under Random Oscillation
Author(s) -
Syuichi Murakami,
Takeshi Yoshimura,
Masaaki Aramaki,
Yusuke Kanaoka,
Kazuki Tsuda,
Kazuo Satoh,
Kensuke Kanda,
Norifumi Fujimura
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1407/1/012082
Subject(s) - vibration , cantilever , acoustics , acceleration , oscillation (cell signaling) , spectral density , nonlinear system , microelectromechanical systems , autocorrelation , accelerometer , piezoelectricity , physics , displacement (psychology) , energy harvesting , random vibration , materials science , power (physics) , voltage , engineering , mathematics , optoelectronics , classical mechanics , psychology , telecommunications , statistics , quantum mechanics , biology , composite material , psychotherapist , genetics
The output characteristics of MEMS piezoelectric vibration energy harvesters (PVEHs) under random oscillations are analysed. We fabricated cantilever-type MEMS-PVEHs using Pb(Zr,Ti)O 3 films. The autocorrelation function of the transient displacement of the cantilever tip under random oscillations features a narrow-band random vibration. From the power spectral density (PSD) of the output voltage of the PVEHs, the resonance frequency decreases and the full-width at half-maximum increases with increasing vibration acceleration. By comparing output properties under various sinusoidal oscillations, nonlinear effects including the soft-spring effect and nonlinear damping effect clearly influence the output characteristics under random oscillations. The power generation is proportional to the square of the vibration acceleration even in the acceleration region where nonlinear effects become conspicuous.