Open AccessMEMS Energy Harvesting Based on Uniform-Stress Cantilever with Multilayer PZT Thin Films
Author(s) -
Seiji Hirai,
Kensuke Kanda,
Takayuki Fujita,
Kazusuke Maenaka
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1407/1/012081
Subject(s) - unimorph , cantilever , materials science , microelectromechanical systems , piezoelectricity , energy harvesting , voltage , composite material , stress (linguistics) , thin film , layer (electronics) , sputtering , power (physics) , optoelectronics , electrical engineering , nanotechnology , engineering , linguistics , physics , philosophy , quantum mechanics
Multilayered piezoelectric MEMS energy harvesters based on sputtering depositions are designed and fabricated. To obtain high endurance and output power, the unimorph cantilever structure with totally 10 μm-thick multilayered PZT thin films and 80 μm-thick Si elastic layer is designed. In addition, the cantilever is designed to undergo a uniform stress on the PZT. The output power and voltage was 90 μW and 1.0 V rms under the input acceleration of approximately 1.2 G (=11.76 m/s 2 ) and optimum load resistance.