Open AccessSurface features of the AlN optical coating deposited on the facet of a high-power AlGaAs/GaAs semiconductor laser
Author(s) -
Э. В. Фомин,
A. D. Bondarev,
S. O. Slipchenko,
N. A. Rudova,
N. A. Pikhtin
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1400/5/055029
Subject(s) - materials science , facet (psychology) , semiconductor , laser , optoelectronics , heterojunction , refractive index , anti reflective coating , ellipsometry , surface roughness , optics , surface finish , semiconductor laser theory , dielectric , coating , thin film , nanotechnology , composite material , social psychology , physics , personality , psychology , big five personality traits
The facets of high-power AlGaAs/GaAs semiconductor lasers were coated with thin dielectric AlN films using reactive ion-plasma technique. The refractive indices of the films were measured by the ellipsometry. It is shown the technique makes it possible to obtain AlN films with a refractive index close to that of a single-crystal material. The scanning probe microscopy was used to estimate the surface roughness of the films. The comparative results of the aging tests of lasers based on the same laser heterostructure with SiO 2 and AlN coatings on their facets are presented.