Open AccessInfluence of VIP treatment modes on nitride coatings formation with different crystallographic orientation
Author(s) -
An. Smirnova,
Л. М. Петров,
А. А. Ашмарин,
S. B. Ivanchuk,
V. S. Semenov
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1396/1/012040
Subject(s) - materials science , nitride , zirconium nitride , zirconium , texture (cosmology) , plasma , metal , surface energy , titanium nitride , substrate (aquarium) , titanium , crystallography , chemical engineering , metallurgy , composite material , chemistry , layer (electronics) , oceanography , image (mathematics) , physics , quantum mechanics , artificial intelligence , computer science , engineering , geology
The change in crystallographic orientation during nitride coatings formation based on titanium and zirconium is studied depending on changes in the concentration ratios for the gas and metal components of the plasma flows and their energy effects on the treated substrate during vacuum ion-plasma (VIP) treatment. It is shown that a decrease in the interaction energy of the gas-metal plasma flow with the surface contributes to the transition of the texture formation of the phase composition to the non-texture.