Open AccessInvestigation of composition and parameters of metal-gas plasma at vacuum arc evaporation of molybdenum cathode in the mode of plasma assistance
Author(s) -
N. A. Prokopenko,
О. В. Крысина,
В. В. Шугуров,
S. S. Kovalsky,
V. E. Prokopiev
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1393/1/012117
Subject(s) - molybdenum , cathode , plasma , argon , thermionic emission , vacuum arc , evaporation , atomic physics , ion , analytical chemistry (journal) , plasma arc welding , electric arc , arc (geometry) , evaporator , chemistry , materials science , electron , volume (thermodynamics) , electrode , metallurgy , thermodynamics , physics , organic chemistry , quantum mechanics , chromatography , heat exchanger , geometry , mathematics
It is shown that simultaneous functioning of the self-sustained arc discharge with the integral-cold molybdenum cathode and non-self-sustained arc discharge with the thermionic and hollow cathodes allows to generate volume metal-gas plasma with density of ≥ 10 10 cm −3 , electrons temperature of ≈ 1–1.5 eV at the gas (argon) pressure of 0.3 Pa and working values of the arc current of evaporator (60–180) A into vacuum volumes of ≥ 0.1 m 3 for effective coating synthesis based on molybdenum by vacuum arc plasma-assisted method. It has been established by the spectrometric method that neutral atoms and single-charged molybdenum ions are present in the area of molybdenum-based coatings condensation along with atoms and ions of the working gas.