Open AccessCharacterization of α-Al2O3 coatings deposited by reactive evaporation in an anodic arc under high-current ion assistance
Author(s) -
A. S. Kamenetskikh,
Н. М. Гаврилов,
P. V. Tretnikov,
А. В. Чукин
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1393/1/012092
Subject(s) - evaporation , anode , materials science , coating , ion , current (fluid) , texture (cosmology) , arc (geometry) , adhesion , adhesive , analytical chemistry (journal) , electrochemistry , composite material , vacuum evaporation , deformation (meteorology) , metallurgy , chemical engineering , thin film , electrode , nanotechnology , chemistry , layer (electronics) , thermodynamics , physics , image (mathematics) , geometry , organic chemistry , mathematics , artificial intelligence , computer science , engineering , chromatography
The article presents the results of studies of the mechanical and adhesive characteristics of α-Al 2 O 3 coatings depositeedby reactive anodic evaporation of Al in an arc discharge at low-energy (50 eV) high-current (up to 15 mA·cm −2 ) ion assistance at 640°C. The coatings are characterized by a strong texture (300), which contributes to an increase in adhesive strength (the critical load at which the destruction of the coating is observed reaches 2560±29 mN). It was shown that there is an optimal discharge current (20 A), at which the best adhesion, the surface quality ( R a = 13.4 nm, R z = 44.7 nm) and the resistance of elastic deformation of coatings ( H / E = 0.08) are achieved.