Open AccessApplication of a forevacuum plasma source of a focused electron beam for cutting quartz glass
Author(s) -
I. Yu Bakeev,
А. С. Климов,
Е. М. Окс,
А. А. Зенин
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1393/1/012075
Subject(s) - cathode ray , quartz , plasma , beam (structure) , electron , materials science , atomic physics , power (physics) , optics , physics , nuclear physics , composite material , quantum mechanics
The paper presents the results of studies of the effect of electron beam parameters on the geometric dimensions of the hole created in quartz glass by an electron beam with the power density of up to 10 6 W·cm −2 generated by a forevacuum plasma source. It is shown that the electron beam with such specific power is capable of creating holes up to several centimeters deep. At the same time with the passage of time the hole acquires an established form. The dependences of the geometrical dimensions of the steady-state form of the hole depending on the parameters of the electron beam are presented.