Open AccessCreating ceramic electrically insulating coating on metal surface
Author(s) -
I. Yu Bakeev,
Yu. A. Burachevsky,
Yu. G. Yushkov
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1393/1/012074
Subject(s) - ceramic , materials science , coating , evaporation , electron beam physical vapor deposition , cathode ray , plasma , electron , electrical conductor , ion beam , surface modification , oxide , composite material , beam (structure) , nanotechnology , thin film , optics , metallurgy , chemistry , physics , quantum mechanics , thermodynamics
The present work deals with the problem of creating dielectric (ceramic) coating on the surfaces of conductive materials for endowing them with insulating properties. The coatings have been created using the electron-beam evaporation of aluminum oxide ceramics. A plasma electron source operating in the forevacuum range of pressure (5–100 Pa) have been used as a source of electrons. It has enabled an effective transport of the electron beam onto the ceramic non-conductive surface and its melting and evaporation. During this process, the electric charge brought by the electron beam onto the surface of the ceramic target is completely neutralized by the ions of gas discharge plasma generated by the electron beam along its transport path towards the target.