Open AccessAnalysis and optimization of photonics devices manufacturing technologies based on Carbon Nanotubes
Author(s) -
Nishant Tripathi,
V. S. Pavelyev,
Valentin S. But,
С. А. Лебедев,
Sunil Kumar,
Prachi Sharma,
Prabhash Mishra,
M. A. Sovetkina,
Sergey A. Fomchenkov,
В. В. Подлипнов,
В. И. Платонов
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1368/2/022034
Subject(s) - carbon nanotube , materials science , wafer , chemical vapor deposition , photonics , nanotechnology , silicon , deposition (geology) , waveguide , carbon fibers , optoelectronics , detector , composite material , optics , paleontology , physics , sediment , biology , composite number
The analysis and optimization of optical devices manufacturing technologies based on carbon nanotubes intended for work in the visible range were carried out. These processes studied in the work have practical application for the deposition of carbon nanotubes and their subsequent use as materials for prototypes of the waveguide and sensor of the visible range. To obtain a layer of carbon nanotubes, a chemical vapor deposition chamber was used. A dense horizontal network of CNTs was grown on silicon wafer by utilizing sandwich type catalyst structure. The growth was carried out with two variable parameters: flow rate and flow duration. Various aspects of the CNTs synthesis, mechanism of CNTs growth and power dependent laser sensing are considered in this article. The remarkable properties of as developed photo detector are its fast response and recovery time with 8% sensitivity.