Open AccessResearch of plasma impact on migration of silicon in ceramic substrates prepared on the basis of MgO
Author(s) -
A. A. Kaleeva,
I. G. Dautov,
Н. Ф. Кашапов,
С. В. Дробышев
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1328/1/012030
Subject(s) - ceramic , materials science , plasma , silicon carbide , coating , substrate (aquarium) , arc (geometry) , metallurgy , micro arc oxidation , silicon , carbide , composite material , mechanical engineering , magnesium , engineering , oceanography , physics , quantum mechanics , magnesium alloy , geology