Open AccessStudy of gas dynamic flow regimes in RFPT technological processes
Author(s) -
Azat R. Gizzatullin,
Y. O. Zhelonkin,
E. F. Voznesencky,
Azamat R. Gizzatullin
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1328/1/012026
Subject(s) - multiphysics , flow (mathematics) , mechanics , argon , materials science , volumetric flow rate , flow measurement , vacuum chamber , dynamic pressure , range (aeronautics) , thermodynamics , physics , atomic physics , composite material , finite element method
Experimental measurements of the pressure in the vacuum chamber of the RF plasma unit at various flow rates of the working gas — Argon — have been carried out, and a dynamic vacuum curve has been constructed for the system. A simulation of the flow of working gases in a vacuum chamber in a COMSOL Multiphysics package was carried out at different flow conditions in the pressure range of 1–100 Pa, the dependence of pressure on flow was established, and the calculated data were compared with experiment.