Open AccessStudy on charge neutralization effect by electron cyclotron resonance plasma source in high vacuum
Author(s) -
Takahiro Morishita,
Daiki Koda,
Saichi Hosoda,
Tomofumi Mogami,
K Minemura,
N. Nomura,
Hitoshi Kuninaka
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1322/1/012018
Subject(s) - electron cyclotron resonance , plasma , neutralization , ion , materials science , xenon , charge (physics) , atomic physics , deposition (geology) , chemistry , analytical chemistry (journal) , physics , nuclear physics , paleontology , organic chemistry , chromatography , sediment , antibody , immunology , biology , quantum mechanics