Open AccessEffect of substrate surface on DR-19 films deposition process with using EFA-PVD method
Author(s) -
Donny Royke Wenas,
Cyrke A. N. Bujung
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1317/1/012059
Subject(s) - materials science , substrate (aquarium) , silane , electric field , deposition (geology) , thin film , stacking , chemical vapor deposition , chemical engineering , nanotechnology , composite material , chemistry , organic chemistry , paleontology , oceanography , physics , quantum mechanics , sediment , engineering , biology , geology