Open AccessMathematical model development for thin zinc oxide film formation with assigned dielectric constant values
Author(s) -
Dmitry Shashin,
Н. И. Сушенцов,
С. А. Степанов
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1313/1/012049
Subject(s) - zinc , dielectric , thin film , sputter deposition , constant (computer programming) , materials science , sputtering , oxide , development (topology) , cavity magnetron , thermodynamics , mathematical analysis , mathematics , metallurgy , optoelectronics , computer science , physics , nanotechnology , programming language