Open AccessDevelopment of a vacuum system for a compact soft X-ray source
Author(s) -
К. А. Сергушичев,
А. А. Смирнов,
A. A. Samokhvalov,
D. B. Belskiy,
E. P. Bolshakov,
V. A. Burtsev
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1313/1/012046
Subject(s) - development (topology) , element (criminal law) , physics , computer science , optics , mathematics , political science , mathematical analysis , law
The results of the development and experimental investigation of vacuum system with micromembrane element for a compact soft X-ray source and their implementation are presented.