Open AccessStructure and tribological behavior of titanium-based coatings deposited by reactive magnetron sputtering
Author(s) -
М. М. Хрущов,
Э. А. Марченко,
И. С. Левин,
V. M. Avdyukhina,
E V Kashourkin,
М. В. Атаманов,
М. И. Петржик,
Elena D. Obraztsova
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1313/1/012028
Subject(s) - materials science , titanium carbide , tribology , titanium , sputter deposition , sputtering , amorphous solid , metallurgy , nitride , titanium nitride , carbide , stoichiometry , composite material , diamond like carbon , thin film , nanotechnology , layer (electronics) , chemistry , crystallography