Open AccessDevelopment electrode of deformation capacitive vacuum gauge
Author(s) -
В. Н. Горобей,
R. E. Kuvandykov
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1313/1/012022
Subject(s) - capacitive sensing , gauge (firearms) , strain gauge , transducer , electrode , deformation (meteorology) , pressure measurement , ultra high vacuum , materials science , acoustics , mechanical engineering , electrical engineering , physics , engineering , composite material , nanotechnology , metallurgy , quantum mechanics
The article is devoted to the development of high-precision details of the vacuum transducer designed to reproduce the unit of absolute pressure.