Open AccessNew method of ultra low gas flow control
Author(s) -
R. O. Emelianenko,
Е. А. Деулин
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1313/1/012017
Subject(s) - flow (mathematics) , flow control (data) , materials science , environmental science , computer science , mechanics , physics , telecommunications
The paper considers the new method of ultralow gas flow control realized with the leak specimen.