Open AccessEffective sputtering yields of alloys chromel and kopel with argon ions in magnetron sputtering system
Author(s) -
Д. В. Духопельников,
V. A. Riazanov,
O. P. Plotnikova
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1313/1/012015
Subject(s) - sputtering , argon , sputter deposition , materials science , thermoelectric effect , ion , metallurgy , cavity magnetron , optoelectronics , thin film , nanotechnology , chemistry , atomic physics , physics , thermodynamics , organic chemistry
This article presents the results of research on sputtering of thermoelectric alloys chromel and kopel. Sputtering was performed in argon atmosphere with magnetron sputtering system. Results of this work can be used in creation of thin-film thermoelectric generators.