Open AccessInvestigation of the emission spectra of a high-power impulse gas discharge of a magnetron during reactive sputtering
Author(s) -
D. V. Dohtarenko,
V. V. Karzin,
D. D. Antoshenko,
S. M. Muhangali,
I. S. Gnivush,
A. M. Saribekyan
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1313/1/012014
Subject(s) - high power impulse magnetron sputtering , argon , sputtering , sputter deposition , materials science , cavity magnetron , analytical chemistry (journal) , oxide , spectral line , impulse (physics) , gas pressure , oxygen , deposition (geology) , optoelectronics , atomic physics , chemistry , thin film , metallurgy , nanotechnology , physics , organic chemistry , chromatography , astronomy , quantum mechanics , paleontology , sediment , biology , petroleum engineering , engineering