Open AccessModelling of cathodic arc PVD plasma flow in separator with non-uniform magnetic field
Author(s) -
А. В. Черногор,
И. В. Блинков,
В. С. Сергевнин,
А. П. Демиров
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1313/1/012011
Subject(s) - separator (oil production) , plasma , magnetic field , vacuum arc , titanium , mechanics , ion , materials science , cathode , atomic physics , chemistry , thermodynamics , metallurgy , physics , nuclear physics , organic chemistry , quantum mechanics