Open AccessInvestigation of the influence of the parameters of a pulsed power source on the properties of a magnetron’s high-power gas discharge
Author(s) -
T. S. Borzykin,
V. V. Karzin,
Д. А. Иванов,
Z. G. Lullin,
R. I. Reznikov
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1313/1/012007
Subject(s) - high power impulse magnetron sputtering , cavity magnetron , plasma , materials science , electric discharge in gases , impulse (physics) , power (physics) , sputter deposition , atomic physics , electrical engineering , sputtering , physics , engineering , thermodynamics , nanotechnology , thin film , nuclear physics , quantum mechanics
The paper presents the results of an experimental study of the emission spectra of a gas discharge during high-power impulse magnetron sputtering. The influence of the repetition frequency and duration of current pulses on the intensity of the spectral lines of various particles is shown. The parameters of the gas-discharge plasma during HiPIMS and at a direct current were also compared.