Open AccessMass-spectrometric leak testing of big objects via test substance leakage monitoring
Author(s) -
V. I. Barishnikov,
L. N. Rozanov,
А. Н. Соколов,
V. N. Soloviev
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1313/1/012004
Subject(s) - leak , leakage (economics) , leak detection , detector , computer science , nuclear engineering , engineering , electrical engineering , environmental engineering , economics , macroeconomics
Mass spectrometer leak monitoring of big objects by means of the test substance leakage test is carried out on the special leak detection plants which include a test object, a leak detector or a partial pressure analyzer, check valves, vacuum meters, pumping equipment and calibrated leaks. The comparison of the flow of the test substance from the test object with the flow from calibrated leaks by means of a comparator allows detecting the leak rate and its measurement error. The article considers the characteristics of these plants and the ways how they can be determined. An example of such a plant intended for the leak detection of electronic equipment is considered.