Open AccessA comparison of surface metrology techniques
Author(s) -
Mike Conroy,
J. H. Armstrong
Publication year - 2005
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/13/1/106
Subject(s) - metrology , surface metrology , stylus , profilometer , white light interferometry , interferometry , dimensional metrology , optics , surface (topology) , strengths and weaknesses , computer science , engineering , materials science , surface finish , mechanical engineering , physics , computer vision , mathematics , philosophy , geometry , epistemology