Open AccessPrecision positioning of a Sawyer motor-driven stage by a surface encoder
Author(s) -
Makoto Tano,
Wei Gao,
Satoshi Kiyono,
Yoshiyuki Tomita,
Kenichi Makino,
Hiroshi Morita
Publication year - 2005
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/13/1/021
Subject(s) - rotary encoder , encoder , stage (stratigraphy) , planar , surface (topology) , position (finance) , grid , optics , acoustics , wavelength , computer science , materials science , physics , geodesy , mathematics , computer graphics (images) , paleontology , geometry , geography , operating system , finance , economics , biology