Open AccessGas permeation properties and preparation of carbon membrane by PECVD method using indene as precursor
Author(s) -
Myat Thiyi Kyaw,
Nathaniel P. Dugos,
Shinsuke Mori,
Susan A. Roces,
Arnel B. Beltran
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1295/1/012057
Subject(s) - plasma enhanced chemical vapor deposition , membrane , permeation , chemical engineering , materials science , fourier transform infrared spectroscopy , analytical chemistry (journal) , selectivity , chemistry , chemical vapor deposition , chromatography , nanotechnology , organic chemistry , catalysis , biochemistry , engineering
This work could demonstrate a new approach to the fabrication of gas separation membrane using indene as polymeric precursor for low pressure PECVD system. Membrane characterization was done by taking Scanning Electron Microscopy (SEM) and FTIR measurements. For membrane performance testing, permeability and selectivity of the membrane were evaluated with pure gases of H 2 , N 2 , and CO 2 using a differential permeation technique. PECVD-derived polyindene membrane showed selectivities of 8.2 and 4.0 for H 2 /CO 2 and H 2 /N 2 , respectively, at room temperature. Polyindene (PIn) membrane was successfully fabricated onto a zeolite 5A substrate via radio frequency plasma-enhanced chemical vapor deposition (RF-PECVD) at room temperature.