Open AccessInfluence of focused-ion-beam microfabrication on superconducting transition in exfoliated thin films of layered superconductor NbSe2
Author(s) -
Hikari Tomori,
Naoki Hoshi,
Dai Inoue,
Akinobu Kanda
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1293/1/012006
Subject(s) - microfabrication , focused ion beam , superconductivity , materials science , thin film , ion , ion beam , optoelectronics , nanotechnology , condensed matter physics , fabrication , chemistry , physics , medicine , alternative medicine , organic chemistry , pathology
We have experimentally studied the influence of the focused ion beam (FIB) microfabrication on the superconducting properties of exfoliated thin films of layered superconductor NbSe 2 through transport measurement. We observed significant decrease of the residual-resistance ratio (RRR), indicating the formation of defects by the FIB. Although clear superconducting transition was seen before the FIB microfabrication, after FIB it was blurred, and one sample exhibited insulating behavior. The possible origins of the changes in the superconducting properties are discussed.