Open AccessFormation of bioactive coatings by radio frequency magnetron sputtering using various calcium phosphate targets and working gases
Author(s) -
Alexander Fedotkin,
Anna Kozelskaya,
Sergei I. Tverdokhlebov
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1281/1/012016
Subject(s) - strontium , sputtering , deposition (geology) , sputter deposition , materials science , calcium , magnesium , cavity magnetron , phosphate , chemical composition , analytical chemistry (journal) , chemical engineering , metallurgy , chemistry , thin film , environmental chemistry , nanotechnology , geology , paleontology , organic chemistry , sediment , engineering