Open AccessIncreasing the selectivity of semiconductor gas sensors working at sinusoidal-varying temperature for machine industry safety systems
Author(s) -
И. Е. Демин
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1260/3/032008
Subject(s) - harmonics , propane , butane , fourier series , fourier transform , selectivity , linearity , fourier analysis , analytical chemistry (journal) , semiconductor , transformation (genetics) , control theory (sociology) , materials science , acetone , ammonia , harmonic , computer science , thermodynamics , chemistry , electronic engineering , acoustics , optoelectronics , mathematics , mathematical analysis , physics , electrical engineering , voltage , engineering , organic chemistry , artificial intelligence , catalysis , biochemistry , control (management) , gene
The article considers the possibility of creating a sensor system on the basis of 50%In 2 O 3 –50%Ga 2 O 3 thin films, functioning at sinusoidal-varying temperature, with high selectivity to a number of key industrial gases including ethanol, acetone, ammonia, and propane-butane. A study of temperature and time dependencies of resistance at a sinusoidal-varying operating temperature was conducted. The deviation of the dynamic dependencies of the resistance from the harmonic law was detected, the reason of which should be considered to be the non-linearity of the temperature dependencies of the gas-induced response and the response time constants. The complex shape of the obtained dynamic characteristics was analyzed using Fourier transform. It has been shown that the resultant Fourier images can be used as sources of a large number of information parameters, which are suitable for increasing the selectivity of the sensor system operating in the considered mode of operation. It has been demonstrated that the selection of the amplitudes of the first three harmonics of Fourier images as information parameters allows the unambiguous identification of the type of the analyzed gas.