Open AccessAnalysis of hafnium containing powders and thin films for CMOS device applications
Author(s) -
Catriona M. McGilvery,
David W. McComb,
Mhairi Mackenzie,
A. J. Craven,
S. McFadzean,
Stefan De Gendt
Publication year - 2008
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/126/1/012003
Subject(s) - hafnium , cmos , materials science , optoelectronics , metallurgy , zirconium