Open AccessUV-Vis spectroscopy of Mn-doped ZnO thin films prepared by pulsed laser deposition
Author(s) -
Henry Riascos,
C. Rosero,
Yenny Patricia Avila Torres
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1247/1/012029
Subject(s) - pulsed laser deposition , materials science , thin film , substrate (aquarium) , band gap , doping , analytical chemistry (journal) , deposition (geology) , ultraviolet , optoelectronics , nanotechnology , chemistry , paleontology , oceanography , chromatography , sediment , biology , geology
Mn-doped zinc oxide (ZnMnO) is of increasing interest to the optoelectronic community for thin film sensors, transistors and solar cells applications. Considerable variability exists in the literature on the growth and doping of ZnMnO films, especially as a function of growth approach, temperature, and oxygen partial pressure. We fabricated ZnMnO thin films on silicon substrates by pulsed laser deposition (PLD). The deposition pressure and the substrate temperature were varied from 2.67 Pa to 26.67 Pa, and from room temperature to 600 °C, respectively. The targets were fabricated with a nominal composition of 1, 5, 10, 15 and 20 wt.% Mn. The influence of the Mn composition, deposition pressure and the substrate temperature on optical properties of the ZnO films was investigated using ultraviolet– visible (UV–Vis) spectrometry. The optical band-gap of the films was evaluated in terms of the Kubelka-Munk function. The results show that the oxygen gas pressure has slightly affected the optical band-gap of the deposited films. Furthermore, the substrate temperature play significant role in the optical properties of the deposited ZnMnO thin films.