Open AccessElectron spectroscopy of various nanostructured carbon films
Author(s) -
O. Yu. Nishchak,
Н Ф Савченко,
O. A. Streletsky,
E. Yu. Zykova,
V. V. Khvostov
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1238/1/012034
Subject(s) - x ray photoelectron spectroscopy , carbon fibers , carbon film , materials science , hydrogen , graphite , plasma , spectroscopy , nitrogen , analytical chemistry (journal) , argon , electron spectroscopy , diamond , thin film , chemical engineering , chemistry , nanotechnology , composite number , composite material , organic chemistry , physics , quantum mechanics , engineering
X-ray photoelectron spectroscopy technique have been used to study carbon films obtained by means of ion-plasma deposition in the plasma of different chemical composition. The detailed analysis of electron spectroscopy data made it possible to determine the structure of the films and the influence of nitrogen and hydrogen admixture in plasma on the structural properties. Diamond-like films are obtained in pure argon plasma, graphite-like and carbon chain structures correspond to nitrogen and hydrogen addition respectively.