Open AccessImplementation of an artificial neural network to predict properties of MOVPE-grown AlGaN layers
Author(s) -
D. S. Arteev,
А. В. Сахаров,
W. V. Lundin,
А. Е. Николаев,
A. F. Tsatsulnikov
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1199/1/012007
Subject(s) - trimethylgallium , metalorganic vapour phase epitaxy , artificial neural network , ammonia , context (archaeology) , decomposition , biological system , chemical vapor deposition , materials science , deposition (geology) , volumetric flow rate , hydrogen , chemistry , chemical engineering , computer science , nanotechnology , layer (electronics) , biology , artificial intelligence , epitaxy , organic chemistry , physics , thermodynamics , engineering , paleontology , sediment