Open AccessGrowth of a-axis-oriented Al-doped ZnO thin film on glass substrate using unbalanced DC magnetron sputtering
Author(s) -
Didik Aryanto,
Putut Marwoto,
Toto Sudiro,
Agus Sukarto Wismogroho,
Sugianto Sugianto
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1191/1/012031
Subject(s) - wurtzite crystal structure , materials science , thin film , crystallite , sputter deposition , sputtering , doping , lattice constant , grain size , texture (cosmology) , composite material , crystallography , optoelectronics , diffraction , optics , nanotechnology , metallurgy , zinc , chemistry , physics , image (mathematics) , artificial intelligence , computer science