Open AccessEffect of heat shield on the heating efficiency in MOCVD chamber by resistive heating
Author(s) -
Lili Zhao,
Zhiming Li,
Jincheng Zhang,
Guoqiang Ren,
Ligen Lu,
Li Feng
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1187/2/022037
Subject(s) - shields , heat shield , shield , heating system , materials science , resistive touchscreen , joule heating , high heat , work (physics) , nuclear engineering , heating element , composite material , mechanics , mechanical engineering , electrical engineering , electromagnetic shielding , engineering , physics , petrology , geology