Open AccessStudy of ultrasound-assisted nanomachining on monocrystalline silicon
Author(s) -
Jiansheng Huang,
Yaozeng Hu,
Huail-Siang Liu
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1176/5/052055
Subject(s) - monocrystalline silicon , materials science , machining , ultrasound , brittleness , silicon , atomic force microscopy , nanotechnology , composite material , optoelectronics , acoustics , metallurgy , physics