Open AccessInfluence of annealing temperature on the morphology and crystal structure of Ga-doped ZnO thin films
Author(s) -
Sulhadi Sulhadi,
Farida Usriyah,
Edy Wibowo,
Budi Astuti,
Sugianto Sugianto,
Didik Aryanto,
Putut Marwoto
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1170/1/012066
Subject(s) - crystallinity , materials science , annealing (glass) , thin film , doping , sputter deposition , grain size , analytical chemistry (journal) , chemical engineering , sputtering , composite material , nanotechnology , optoelectronics , chemistry , chromatography , engineering