Open AccessMathematical modelling of RF plasma flow at low pressure with metastable and electrodynamics
Author(s) -
В. С. Желтухин,
A. Yu. Shemakhin
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1158/4/042044
Subject(s) - plasma , metastability , knudsen number , atomic physics , physics , electron , electric field , flow (mathematics) , ion , quantum electrodynamics , computational physics , mechanics , nuclear physics , quantum mechanics