Open AccessDesign and performance of differential pumping system of coating unit
Author(s) -
Prasanta Karmakar,
Namita Maiti,
A.V. Bapat
Publication year - 2008
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/114/1/012069
Subject(s) - vacuum chamber , chamber pressure , materials science , substrate (aquarium) , coating , volumetric flow rate , electron gun , range (aeronautics) , optics , mechanics , physics , composite material , cathode ray , electron , nuclear physics , oceanography , metallurgy , geology