Open AccessTi-Zr-V thin films as non-evaporable getters (NEG) to produce extreme high vacuum
Author(s) -
Rajendra K. Sharma,
N. Mithal,
Jagannath,
K. G. Bhushan,
D. Srivastava,
H R Prabhakara,
S. C. Gadkari,
J. V. Yakhmi,
V. C. Sahni
Publication year - 2008
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/114/1/012050
Subject(s) - getter , materials science , ultra high vacuum , vacuum packing , composite material , metallurgy , optoelectronics , nanotechnology , food science , chemistry