Open AccessOne-dimensional numerical model of a low-frequency inductively coupled plasma
Author(s) -
N. A. Demin,
А. В. Федосеев,
V. A. Pinaev,
M. V. Isupov,
G. I. Sukhinin
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1128/1/012113
Subject(s) - argon , plasma , atomic physics , inductively coupled plasma , electric field , metastability , range (aeronautics) , plasma parameters , electron , materials science , electron temperature , current (fluid) , chemistry , physics , thermodynamics , organic chemistry , quantum mechanics , composite material