Open AccessOhmic contacts to n-type 4H- and 6H-SiC
Author(s) -
В. И. Егоркин,
A. V. Nezhentsev,
V. E. Zemlyakov,
В. А. Гудков,
V. I. Garmash
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1124/8/081021
Subject(s) - ohmic contact , materials science , silicon carbide , contact resistance , etching (microfabrication) , electrical contacts , layer (electronics) , carbide , silicon , metallurgy , optoelectronics , composite material