Open AccessHigh robustness of epitaxial 4H-SiC graphene to oxidation processes
Author(s) -
Vladimir Prudkovskiy,
Konstantin P. Katin,
Mikhail M. Maslov,
Pascal Puech,
Rositsa Yakimova,
G. Deligeorgis
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1124/8/081020
Subject(s) - graphene , robustness (evolution) , epitaxy , materials science , fabrication , graphene nanoribbons , ozone , optoelectronics , chemical engineering , nanotechnology , chemistry , medicine , biochemistry , alternative medicine , organic chemistry , layer (electronics) , pathology , engineering , gene