Open AccessElectromechanical bending microactuator as optical shutter
Author(s) -
R Kleimanov,
Yakov Enns,
E. N. Pyatishev,
Ivan Komarevtsev
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1124/8/081007
Subject(s) - shutter , microactuator , cantilever , materials science , voltage , deflection (physics) , bending , optics , dielectric , polarization (electrochemistry) , actuator , curvature , fabrication , optoelectronics , composite material , engineering , electrical engineering , medicine , chemistry , physics , geometry , mathematics , alternative medicine , pathology