Open AccessLifetime testing of a MEMS switch with Pt-Pt contact
Author(s) -
Ilia V. Uvarov,
A. N. Kupriyanov
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1124/7/071008
Subject(s) - contact resistance , microelectromechanical systems , resistive touchscreen , materials science , electrical contacts , electrode , optoelectronics , aluminium , platinum , contact area , electrical engineering , composite material , engineering , chemistry , biochemistry , layer (electronics) , catalysis