Open AccessInvestigation of the electrical and optical properties of nickel oxide films produced by RF magnetron sputtering method
Author(s) -
A. S. Aglikov,
А. М. Можаров,
D. A. Kudryashov,
D Sosnin,
А. П. Васильев,
A D Bolshakov,
Sergey Makarov,
I. S. Mukhin
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1124/4/041042
Subject(s) - non blocking i/o , materials science , nickel oxide , argon , sputter deposition , thin film , sputtering , electrical resistivity and conductivity , cavity magnetron , oxide , nickel , fabrication , perovskite (structure) , optoelectronics , analytical chemistry (journal) , metallurgy , chemical engineering , nanotechnology , chemistry , electrical engineering , biochemistry , organic chemistry , engineering , chromatography , catalysis , medicine , alternative medicine , pathology