Open AccessDevelopment of local catalytic centers positioning technology for carbon nanotubes growth
Author(s) -
O. I. Il’in,
N N Rudyk,
M V Kuzhelev,
Alexander A. Fedotov
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1124/2/022029
Subject(s) - carbon nanotube , microelectronics , nanotechnology , materials science , nanoscopic scale , lithography , microsystem , catalysis , nanoelectronics , explosive material , carbon fibers , nanometre , optoelectronics , chemistry , composite material , composite number , biochemistry , organic chemistry