Open AccessFormation of hexagonal silicon regions in silicon
Author(s) -
Aleikolskaya,
Д. С. Королев,
A. N. Mikhaylov,
А. И. Белов,
A. A. Sushkov,
Д. А. Павлов,
D. I. Tetelbaum
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1124/2/022007
Subject(s) - silicon , transmission electron microscopy , hexagonal crystal system , materials science , substrate (aquarium) , phase (matter) , layer (electronics) , ion , hexagonal phase , crystallography , nanotechnology , optoelectronics , chemistry , geology , oceanography , organic chemistry