Open AccessInvestigation of Titanium Oxide Film on Sapphire Substrate for Gas Sensor
Author(s) -
Yu. V. Klunnikova,
S. P. Malyukov,
A. V. Sayenko,
M. I. Tolstunov
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1124/2/022003
Subject(s) - sapphire , materials science , annealing (glass) , titanium , wavelength , titanium oxide , oxide , optoelectronics , substrate (aquarium) , laser , chemical engineering , optics , composite material , metallurgy , engineering , oceanography , physics , geology