Open AccessStructure, chemical composition, mechanical properties of fluorine-containing coatings based on diamond-like carbon
Author(s) -
V. P. Kazachenko,
А.М Dvorak,
Ihar Razanau,
Hong Li
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1121/1/012016
Subject(s) - materials science , diamond like carbon , fluorine , carbon fibers , graphite , chemical composition , vacuum arc , cathodic arc deposition , cathodic protection , composite material , cathode , chemical engineering , metallurgy , thin film , nanotechnology , electrochemistry , chemistry , organic chemistry , electrode , composite number , engineering